Patent Assignment
Reel/Frame 029264/0277
Assignment of Assignor's Interest
Recorded: 2012-11-08
Pages: 6
Assignors
BASEMAN, ROBERT J.
Executed: 2012-10-22
HE, JINGRUI
Executed: 2012-10-22
YASHCHIN, EMMANUEL
Executed: 2012-10-21
ZHU, YADA
Executed: 2012-10-22
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Run-to-Run Control Utilizing Virtual Metrology in Semiconductor Manufacturing