Patent Assignment
Reel/Frame 029272/0462
Assignment of Assignor's Interest
Recorded: 2012-11-09
Pages: 4
Assignors
KAUSHAL, SANJEEV
Executed: 2012-11-07
PATEL, SUKESH JANUBHAI
Executed: 2012-10-29
POLAK, WOLFGANG
Executed: 2012-10-29
WATERMAN, AARON ARCHER
Executed: 2012-10-29
WOLFE, ORION
Executed: 2012-10-29
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Autonomous Tool Parameter Impact Identification System for Semiconductor Manufacturing