Patent Assignment
Reel/Frame 029321/0426
Assignment of Assignor's Interest
Recorded: 2012-11-19
Pages: 4
Assignors
TAKAHASHI, MINORU
Executed: 2012-11-06
SAITO, YUMIKO
Executed: 2012-11-08
MOMO, JUNPEI
Executed: 2012-11-06
MORIWAKA, TAMAE
Executed: 2012-11-06
KUSUMOTO, NAOTO
Executed: 2012-11-12
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Flexible Substrate Processing Apparatus