Patent Assignment
Reel/Frame 029365/0474
Assignment of Assignor's Interest
Recorded: 2012-11-28
Pages: 3
Assignors
OTA, TAKASHI
Executed: 2012-11-01
AKANISHI, YUYA
Executed: 2012-11-01
HASHIZUME, AKIO
Executed: 2012-11-06
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.