Patent Assignment
Reel/Frame 029372/0507
Assignment of Assignor's Interest
Recorded: 2012-11-29
Pages: 3
Assignors
OKADA, MITSUHIRO
Executed: 2012-11-12
KAKIMOTO, AKINOBU
Executed: 2012-11-12
HASEBE, KAZUHIDE
Executed: 2012-10-30
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Forming Seed Layer and Method of Forming Silicon-Containing Thin Film