Assignment of Assignor's Interest

Recorded: 2012-12-04 Pages: 3

Assignors

SAITO,TATSUYUKI

Executed: 2012-10-16

SAKAI, MASANORI

Executed: 2012-11-30

KAGA, YUKINAO

Executed: 2012-11-21

YOKOGAWA, TAKASHI

Executed: 2012-12-03

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 1018980, JAPAN

Covered Property (1)

Semiconductor Device Manufacturing Method and Substrate Processing Apparatus

Application: 13/693,647 →

Publication: US 2013/0095668