Assignment of Assignor's Interest

Recorded: 2012-12-20 Pages: 3

Assignors

TAKEAKI, REI

Executed: 2012-12-07

NAMBA, TOSHIMITSU

Executed: 2012-12-10

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Application: 13/721,285 →

Publication: US 2013/0167876

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.