A Modifying Conversion

Recorded: 2013-01-17 Pages: 6

Assignor

CARL ZEISS SMT AG

Executed: 2010-10-14

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Method for Producing Facet Mirrors and Projection Exposure Apparatus

Application: 13/683,138 →

Publication: US 2013/0100426

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.