Patent Assignment
Reel/Frame 029690/0947
Assignment of Assignor's Interest
Recorded: 2013-01-25
Pages: 3
Assignors
HUANG, CHIA-HUNG
Executed: 2012-12-13
HWANG, JENG-JYI
Executed: 2012-12-13
YANG, CHI-MING
Executed: 2012-12-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Apparatus and Method of Cleaning Wafers