Patent Assignment
Reel/Frame 029708/0494
Assignment of Assignor's Interest
Recorded: 2013-01-29
Pages: 3
Assignors
LU, HSIN-HSIEN
Executed: 2013-01-24
CHANG, TING-KUI
Executed: 2013-01-24
TSAI, JUNG-TSAN
Executed: 2013-01-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Apparatus, Method, and Composition for Far Edge Wafer Cleaning