Patent Assignment
Reel/Frame 029808/0693
Assignment of Assignor's Interest
Recorded: 2013-02-13
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Gas Supply Systems for Substrate Processing Chambers and Methods Therefor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.