Patent Assignment
Reel/Frame 029890/0687
Assignment of Assignor's Interest
Recorded: 2013-02-27
Pages: 3
Assignor
DEN BOEF, ARIE JEFFREY
Executed: 2008-08-27
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology