Patent Assignment
Reel/Frame 029904/0930
Assignment of Assignor's Interest
Recorded: 2013-03-01
Pages: 4
Assignors
TSAI, CHUN HSIUNG
Executed: 2013-02-26
YU, SHENG-WEN
Executed: 2013-02-27
CHOU, YING-MIN
Executed: 2013-02-26
PAI, YI-FANG
Executed: 2013-02-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Cyclic Deposition Etch Chemical Vapor Deposition Epitaxy to Reduce Epi Abnormality