Assignment of Assignor's Interest

Recorded: 2013-03-07 Pages: 2

Assignor

KATO, HIROSHI

Executed: 2013-03-05

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Application: 13/787,987 →

Publication: US 2013/0333731

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.