Patent Assignment
Reel/Frame 029986/0576
Assignment of Assignor's Interest
Recorded: 2013-03-13
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Power Source Management Method
Application:
13/822,916 →
Publication:
US 2013/0178971
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.