Patent Assignment
Reel/Frame 029993/0569
Modifying Conversion
Recorded: 2013-03-14
Pages: 6
Assignor
CARL ZEISS SMT AG
Executed: 2010-09-23
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Charged Particle Detection System and Multi-Beamlet Inspection System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.