Patent Assignment
Reel/Frame 030016/0169
Assignment of Assignor's Interest
Recorded: 2013-03-15
Pages: 6
Assignors
DORF, LEONID
Executed: 2013-03-01
RAUF, SHAHID
Executed: 2013-03-01
LIU, JONATHAN
Executed: 2013-02-27
KENNEY, JASON A.
Executed: 2013-03-11
NGUYEN, ANDREW
Executed: 2013-03-11
COLLINS, KENNETH S.
Executed: 2013-03-14
RAMASWAMY, KARTIK
Executed: 2013-03-13
LANE, STEVEN
Executed: 2013-03-11
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Three-Coil Inductively Coupled Plasma Source with Individually Controlled Coil Currents from a Single Rf Power Generator