Patent Assignment
Reel/Frame 030027/0179
Assignment of Assignor's Interest
Recorded: 2013-03-18
Pages: 2
Assignors
NISHIMURA, KAZUHIRO
Executed: 2013-03-05
MORITA, AKIHIKO
Executed: 2013-03-18
INAGAKI, YUKIHIKO
Executed: 2013-03-06
Assignee
SOKUDO CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Exposure Device, Substrate Processing Apparatus, Method for Exposing Substrate and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.