Patent Assignment
Reel/Frame 030056/0306
Assignment of Assignor's Interest
Recorded: 2013-03-21
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Process Liquid Changing Method and Substrate Processing Apparatus