Patent Assignment
Reel/Frame 030215/0286
Assignment of Assignor's Interest
Recorded: 2013-04-15
Pages: 3
Assignor
SOCHA, ROBERT JOHN
Executed: 2010-07-09
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Determining the Gradient and Hessian of the Image Log Slope for Design Rule Optimization for Accelerating Source Mask Optimization (SMO)
Patent:
8,751,979 →
Application:
13/741,802 →