Patent Assignment
Reel/Frame 030290/0460
Assignment of Assignor's Interest
Recorded: 2013-04-25
Pages: 4
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Inspection Apparatus, Inspection Method, Exposure Method, and Method for Manufacturing Semiconductor Device