Patent Assignment
Reel/Frame 030307/0316
Assignment of Assignor's Interest
Recorded: 2013-04-29
Pages: 6
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
System and Method for Analyzing Voltage Breakdown in Electrostatic Chucks