Patent Assignment
Reel/Frame 030360/0445
Assignment of Assignor's Interest
Recorded: 2013-05-07
Pages: 3
Assignor
WIMPLINGER, MARKUS
Executed: 2013-03-11
Assignee
EV GROUP E. THALLNER GMBH
DI ERICH THALLNER STRASSE 1, ST. FLORIAN AM INN, 4782, AUSTRIA
Covered Property
(1)
Measuring Device and Method for Measuring Layer Thicknesses and Defects in a Wafer Stack