Patent Assignment
Reel/Frame 030384/0943
Assignment of Assignor's Interest
Recorded: 2013-05-09
Pages: 3
Assignor
LIU, HUA-YU
Executed: 2010-11-10
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Pattern Selection for Full-Chip Source and Mask Optimization