Patent Assignment
Reel/Frame 030408/0046
Assignment of Assignor's Interest
Recorded: 2013-05-14
Pages: 3
Assignors
CHU, CHIA-HUA
Executed: 2013-03-21
CHENG, CHUN-WEN
Executed: 2013-03-21
LEE, TE-HAO
Executed: 2013-03-21
LIN, CHUNG-HSIEN
Executed: 2013-05-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Mems Devices and Fabrication Methods Thereof