Patent Assignment
Reel/Frame 030440/0095
Assignment of Assignor's Interest
Recorded: 2013-05-19
Pages: 4
Assignors
PEARMAN, RYAN
Executed: 2013-05-13
PACK, ROBERT C.
Executed: 2013-05-16
FUJIMURA, AKIRA
Executed: 2013-05-13
Assignee
D2S, INC.
4040 MOORPARK AVE., #250, SAN JOSE, CALIFORNIA, 95117
Covered Property
(1)
Method and System for Critical Dimension Uniformity Using Charged Particle Beam Lithography