Patent Assignment
Reel/Frame 030469/0163
Assignment of Assignor's Interest
Recorded: 2013-05-22
Pages: 5
Assignors
WU, JUI-CHING
Executed: 2013-05-03
CHEN, JENG-HORNG
Executed: 2013-05-03
CHEN, CHIA-CHEN
Executed: 2013-05-03
CHANG, SHU-HAO
Executed: 2013-05-03
CHIEN, SHANG-CHIEH
Executed: 2013-05-03
CHIEN, MING-CHIN
Executed: 2013-05-03
YEN, ANTHONY
Executed: 2013-05-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., ("TSMC")
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for Performing Lithography Process in Semiconductor Device Fabrication