Patent Assignment
Reel/Frame 030493/0942
Assignment of Assignor's Interest
Recorded: 2013-05-28
Pages: 3
Assignor
PFAFF, PAUL L.
Executed: 2006-07-05
Assignee
ATTOFEMTO, INC.
14535 WESTLAKE DRIVE, SUITE A-1, LAKE OSWEGO, OREGON, 97035-7775
Covered Property
(1)
Multiple Optical Wavelength Interferometric Testing Methods for the Development and Evaluation of Subwavelength Sized Features Within Semiconductor Devices and Materials, Wafers, and Monitoring All Phases of Development and Manufacture