Patent Assignment
Reel/Frame 030503/0675
Assignment of Assignor's Interest
Recorded: 2013-05-29
Pages: 8
Assignors
KAI, YOSHIHIRO
Executed: 2013-05-09
ISHIKAWA, SHINYA
Executed: 2013-05-09
KAMIKAWA, YUJI
Executed: 2013-05-09
NAGAMINE, SHUICHI
Executed: 2013-05-09
SHINDO, NAOKI
Executed: 2013-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Nozzle Cleaning Device, Nozzle Cleaning Method, and Substrate Processing Apparatus