Patent Assignment
Reel/Frame 030514/0399
Assignment of Assignor's Interest
Recorded: 2013-05-30
Received: 2013-05-30
Pages: 7
Assignors
CHEN, LI-MIN
Executed: 2012-07-13
LIU, JUN
Executed: 2012-07-13
JENQ, SHRANE NING
Executed: 2012-07-30
BOGGS, KARL E.
Executed: 2013-03-04
THOMAS, NICOLE
Executed: 2013-03-04
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CT, 06810, UNITED STATES
Covered Property
(1)
Aqueous Clean Solution with Low Copper Etch Rate for Galvanic Ruthenium/Copper Corrosion Improvement
Application:
61/648,937 →