Patent Assignment
Reel/Frame 030532/0005
Assignment of Assignor's Interest
Recorded: 2013-06-03
Pages: 6
Assignors
DORF, LEONID
Executed: 2013-05-06
RAUF, SHAHID
Executed: 2013-05-02
LIU, JONATHAN
Executed: 2013-04-26
KENNEY, JASON A.
Executed: 2013-05-02
NGUYEN, ANDREW
Executed: 2013-05-03
COLLINS, KENNETH S.
Executed: 2013-05-13
RAMASWAMY, KARTIK
Executed: 2013-05-07
LANE, STEVEN
Executed: 2013-05-07
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Three-Coil Inductively Coupled Plasma Source with Individually Controlled Coil Currents from a Single Rf Power Generator