Patent Assignment
Reel/Frame 030605/0580
Assignment of Assignor's Interest
Recorded: 2013-06-13
Pages: 4
Assignors
KAWANO, HISASHI
Executed: 2013-05-30
ITO, NORIHIRO
Executed: 2013-05-30
HACHIYA, YOSUKE
Executed: 2013-05-30
NOGAMI, JUN
Executed: 2013-05-30
OOISHI, KOTARO
Executed: 2013-05-30
KANNO, ITARU
Executed: 2013-05-30
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method