Patent Assignment
Reel/Frame 030606/0703
Assignment of Assignor's Interest
Recorded: 2013-06-13
Pages: 8
Assignors
NAMIKI, KEISUKE
Executed: 2013-05-30
YASUDA, HOZUMI
Executed: 2013-05-30
TOGASHI, SHINGO
Executed: 2013-05-30
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Method and Polishing Apparatus