Patent Assignment
Reel/Frame 030626/0252
Assignment of Assignor's Interest
Recorded: 2013-06-17
Pages: 2
Assignors
MASUHARA, HIROFUMI
Executed: 2013-05-31
ARAI, KENICHIRO
Executed: 2013-05-20
MIYAGI, MASAHIRO
Executed: 2013-05-20
ENDO, TORU
Executed: 2013-05-20
Assignee
DAINIPPON SCREEN MFG CO., LTD
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.