Assignment of Assignor's Interest

Recorded: 2013-06-17 Pages: 2

Assignors

MASUHARA, HIROFUMI

Executed: 2013-05-31

ARAI, KENICHIRO

Executed: 2013-05-20

MIYAGI, MASAHIRO

Executed: 2013-05-20

ENDO, TORU

Executed: 2013-05-20

Assignee

DAINIPPON SCREEN MFG. CO., LTD

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Application: 13/853,016 →

Publication: US 2013/0260574

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.