Patent Assignment
Reel/Frame 030676/0840
Assignment of Assignor's Interest
Recorded: 2013-06-25
Pages: 3
Assignor
WANG, CHUNG-CHENG
Executed: 2013-06-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for Dispensing Photoresist