Patent Assignment
Reel/Frame 030680/0929
Assignment of Assignor's Interest
Recorded: 2013-06-25
Pages: 4
Assignors
KENNEY, JASON A.
Executed: 2013-05-28
CARDUCCI, JAMES D.
Executed: 2013-05-29
COLLINS, KENNETH S.
Executed: 2013-05-30
FOVELL, RICHARD
Executed: 2013-05-28
RAMASWAMY, KARTIK
Executed: 2013-05-28
RAUF, SHAHID
Executed: 2013-05-30
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Symmetrical Inductively Coupled Plasma Source with Coaxial Rf Feed and Coaxial Shielding