Assignment of Assignor's Interest

Recorded: 2013-08-02 Pages: 2

Assignors

FUJIWARA, NAOZUMI

Executed: 2013-05-27

MIYA, KATSUHIKO

Executed: 2013-05-09

KATO, MASAHIKO

Executed: 2013-05-27

TOKURI, KENTARO

Executed: 2013-05-09

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME HORIKAWA-DORI, KAMIGYO-KU,, KYOTO-SHI, KYOTO, 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Application: 13/730,443 →

Publication: US 2013/0167877

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.