Patent Assignment
Reel/Frame 031130/0633
Assignment of Assignor's Interest
Recorded: 2013-09-04
Pages: 4
Assignors
KOEZUKA, JUNICHI
Executed: 2013-08-22
SASAKI, TOSHINARI
Executed: 2013-07-31
TOCHIBAYASHI, KATSUAKI
Executed: 2013-08-27
YAMAZAKI, SHUNPEI
Executed: 2013-08-06
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Semiconductor Device Comprising a Void Portion in an Insulation Film and Method for Manufacturing a Semiconductor Device Comprising a Void Portion in an Insulating Film