Patent Assignment
Reel/Frame 031148/0552
Assignment of Assignor's Interest
Recorded: 2013-09-06
Pages: 4
Assignors
HAYASHI, MOTOYASU
Executed: 2013-08-12
SHIBUKAWA, JUN
Executed: 2013-08-12
TAKAHASHI, MITSUKAZU
Executed: 2013-08-12
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method for Performing Cleaning Process and the Like on Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.