Patent Assignment
Reel/Frame 031178/0531
Assignment of Assignor's Interest
Recorded: 2013-09-10
Pages: 5
Assignors
RAJYAGURU, CHIRAG
Executed: 2013-08-01
BAUMGART, PETER M.
Executed: 2013-07-31
VASCHENKO, GEORGIY O.
Executed: 2013-08-05
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROPERTY DEPT. M/S 4-2D, SAN DIEGO, CALIFORNIA, 92127-2413
Covered Property
(1)
Droplet Generator with Actuator Induced Nozzle Cleaning
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.