Assignment of Assignor's Interest

Recorded: 2013-09-24 Pages: 4

Assignors

YAMAGUCHI, HIDETO

Executed: 2013-09-03

KOSUGI, TETSUYA

Executed: 2013-09-03

UENO, MASAAKI

Executed: 2013-09-03

Assignee

HITACHI KOKUSAI ELECTRIC INC.

4-14-1, SOTOKANDA,, CHIYODA-KU, TOKYO, 1018980, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Thermocouple Support

Application: 14/033,880 →

Publication: US 2014/0120636