Patent Assignment
Reel/Frame 031298/0512
Assignment of Assignor's Interest
Recorded: 2013-09-27
Pages: 5
Assignors
WU, QIANG
Executed: 2013-09-16
ZU, YANLEI
Executed: 2013-09-16
HU, HUAYONG
Executed: 2013-09-16
GU, YIMING
Executed: 2013-09-23
Assignee
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
18 ZHANGJIANG ROAD, PUDONG NEW AREA,, SHANGHAI, 201203, CHINA
Covered Property
(1)
Exposure Apparatus and Exposure Method Thereof