Patent Assignment
Reel/Frame 031308/0627
Assignment of Assignor's Interest
Recorded: 2013-09-30
Pages: 3
Assignor
O'HARA, ANTHONY
Executed: 2013-09-06
Assignee
MEMSSTAR LIMITED
STARLAW PARK, STARLAW ROAD, LIVINGSTON, EH54 8SF, UNITED KINGDOM
Covered Property
(1)
Vapour Etch of Silicon Dioxide with Improved Selectivity