Patent Assignment
Reel/Frame 031332/0594
Assignment of Assignor's Interest
Recorded: 2013-10-02
Pages: 4
Assignors
SPURLIN, TIGHE A.
Executed: 2013-09-12
DUNCAN, JAMES E.
Executed: 2013-09-13
LAU, STEPHEN
Executed: 2013-09-13
STOWELL, MARSHALL
Executed: 2013-09-13
REID, JONATHAN D.
Executed: 2013-09-12
PORTER, DAVID
Executed: 2013-09-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Remote Plasma Treatment for Reducing Metal Oxides on a Metal Seed Layer
Application:
14/020,339 →
Publication:
US 2015/0072538