Patent Assignment
Reel/Frame 031383/0862
Assignment of Assignor's Interest
Recorded: 2013-10-10
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Micro-Electro Mechanical System (Mems) Device Having a Blocking Layer Formed Between Closed Chamber and a Dielectric Layer of a Cmos Substrate.