Assignment of Assignor's Interest

Recorded: 2013-10-23 Pages: 5

Assignors

NAKAMURA, YASUNORI

Executed: 2013-09-24

NAKAGAWA, NOBUHIKO

Executed: 2013-09-24

KAWASHIMA, NAOHIKO

Executed: 2013-09-24

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 6028585, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Substrate Processing System, Control Method for Substrate Processing Apparatus and Storage Medium

Patent: 9,389,601 →

Application: 14/061,495 →

Publication: US 2014/0121791

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.