Patent Assignment
Reel/Frame 031485/0970
Assignment of Assignor's Interest
Recorded: 2013-10-28
Pages: 5
Assignors
LAVOIE, ADRIEN
Executed: 2013-10-16
KANG, HU
Executed: 2013-10-16
LEESER, KARL
Executed: 2013-10-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Tandem Source Activation for Cyclical Deposition of Films