Patent Assignment
Reel/Frame 031590/0311
Assignment of Assignor's Interest
Recorded: 2013-11-13
Pages: 6
Assignors
TORIYA, DAISUKE
Executed: 2013-10-21
KOMORI, EIICHI
Executed: 2013-10-21
AMIKURA, MANABU
Executed: 2013-10-22
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus