Patent Assignment
Reel/Frame 031652/0162
Assignment of Assignor's Interest
Recorded: 2013-11-21
Pages: 5
Assignors
MADSEN, JONATHAN M.
Executed: 2013-05-20
SHCHEGROV, ANDREI V.
Executed: 2013-04-30
BAKEMAN, MICHAEL
Executed: 2013-03-21
DZIURA, THADDEUS GERARD
Executed: 2013-03-20
KUZNETSOV, ALEXANDER
Executed: 2013-03-19
TSAI, BIN-MING (BENJAMIN)
Executed: 2013-02-26
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optical Metrology Using Targets With Field Enhancement Elements